A polycrystalline silicon reactor 1 which can prevent polycrystalline silicon which deposits on the surface of an electrode 5 holding a silicon seed rod 4 from being peeled off is provided. The mediator correlates the multimedia content with the plurality of network devices. The substrate support device includes robot blades and a holding chuck. Further, adopting this simple present invention can reduce expenses and concurrently has an advantage of lightweight, convenience and durability.