A method for disposing of carbon dioxide is provided. A wafer is secured on a stage in a lower kiln, a DAF tape is held by the lower kiln and an upper kiln arranged to be opposed to the lower kiln, and further, the pressure in the upper kiln is made relatively higher than the pressure in the lower kiln so as to swell the DAF tape and to adhere the DAF tape to the wafer. The apparatus includes a chamber for accommodating the board; an electrode mounted to the chamber for generating plasma in the chamber with a voltage applied thereto, a table for supporting the board in the chamber, and a masking member which is provided above the board. If the request does not specify a customized technique, the system uses a default technique to obscure the password. The phosphor can be excited by light of the light emitting element, and emit luminescent radiation.