In a manufacturing method of an image sensor, a lightproof film is formed over a wiring area; a transparent film is formed over an imaging area using a material capable of patterning; a transparent film, for forming micro lense on top, is formed on the transparent film, wherein a height of the top surfaces of the transparent film and the lightproof film are evenly formed. For this purpose, the installation comprises a mixing device, in which at least one spray head connected to a hot-water main, is arranged for the supply of the partial flow. According to the above method, the probing test can be performed with the opening parts formed in the passivation film. The head portion includes a tab, a channel, a slot and an apeture, the tab extending from the head and forming the channel with the base, the channel leading to the slot which guides the trotline into the apeture.