A production method of an isoxazoline-substituted benzoic acid amide compound of Formula where X is a halogen atom, C1-6 haloalkyl, etc. During transmission data pulses may suffer jitter. The fitting, which is made of a fitting base portion and a fitting tubular portion, is attached to the spacer layer at the spacer edge by way of, for example, two screws. The pistons move a flow tube between various locations within the device. The bottom device layer is bonded to the top device layer by an oxide-to-oxide bond between the first bonding oxide layer and the second bonding oxide layer. A compressor rotor of the compressor and a turbine rotor of the expansion turbine are attached to a common main shaft in the turbine unit in such a manner that the turbine unit drives the compressor rotor with a power generated by the turbine rotor, and the main shaft is rotatably supported by a rolling contact bearing.