A touch screen of a touch panel includes plural detection column wirings and plural detection row wirings that cross the detection column wirings. At least one of the plurality of cutting elements includes a first area defining a trailing edge, a second area proximate the first area defining a main wear surface, and a third area proximate the second area and defining a leading edge relief zone. Then, a counter section operates based on this operating clock and successively outputs shifted pulses SR1out to SRmount from shift registers to. The etching apparatus independently controls an amount of reaction gas injected into a central zone and an edge zone of a chamber when the reaction gas is injected into the chamber, thereby controlling uniformity of density of plasma, deposition speed, etching speed, and the like in the etching process.