A scanning exposure apparatus in which a mask and a substrate are moved in a first direction while images of patterns of the mask are exposed onto the substrate includes at least a pair of projection optical systems that are spaced from each other in the first direction by a predetermined distance. The sensor is disposed in a region of the clamping assembly subjected, in use, to a force in a predetermined direction due to the compressive forces exerted on the container in the clamping state. If one wishes to alter the inherent inductance characteristics of the primary inductor, the transistor coupling both ends of the second inductor is actuated.