A semiconductor integrated circuit device includes a memory block. The use of intra-plane prediction, which relies on correlation between neighboring pixels of the same color, is enhanced by adding inter-plane prediction that relies on correlation between neighboring pixels in different color planes. The temperature adjusting unit enables adjustment of a temperature of an inner wall or structural body of the process chamber or the conveyance chamber or the lock chamber to be lower than a temperature of the substance to be processed, in conveying the substance to be processed. An action module is operatively connected to the analyzing module and is configured to perform at least one action, including adjusting a threshold value of the abnormal pattern range for a subsequent pattern of login attempt results if the pattern of login attempt results has an indicator of a predetermined abnormal pattern range.