A rotary fluid machine, such as a pump or motor, is provided with a fluid flow control mechanism that allows the flow of fluid to be easily and precisely controlled. According to the method, a target medium comprising at least a target nuclide material is irradiated in an irradiation zone with neutron irradiation. A plurality of assembler source code instructions may be generated by disassembling the binary. The dry cleaning step is performed by supplying into the chamber a deposit removing gas for removing the deposits produced in the chamber during the first plasma processing step and a dummy substrate etching gas capable of etching the dummy substrate. For example, a monochrome region may be nested inside a colour region, in which the colour region may be nested between off regions.