A compound of the having the general formula or general formula : wherein Z, Z, B, C, R1, R2, Q, W, and n are as described herein. The stator has electromechanically active actuators, exhibiting shape changes upon excitation, rigidly attached to a common stator block. The computations use the information. This process effectuates production of a oxynitride film with uniform distributions of nitrogen and oxygen throughout.