A substrate processing apparatus includes a display unit having an operation screen, a first control section that transmits a control instruction for processing a substrate and a second control section that performs control according to the control instruction from the first control section. The present invention provides a monoclonal antibody or an antibody fragment thereof which binds to a cell membrane-bound HB-EGF, a membrane type HB-EGF and a secretory HB-EGF. The crankcase is covered by a crankcase cover from the axial outside. The thickness difference h between one principal surface of the excitation unit and the adjacent peripheral region is obtained by the following equation: h=\u2212143 The length of the x-axis direction of the crystallographic X-axis is Mx. The apparatus may include a sensor to allow automatic switching between one or more of modes, directional sensitivity patterns and types of recording session.