A method of fabricating high-quality, substantially relaxed SiGe-on-insulator substrate is provided by implanting oxygen into a SiSiGe multilayer heterostructure which comprises alternating Si and SiGe layers. The removable tray device comprises a tray component secured to a folding chair via a pinned hinge that allows the tray component to rotate vertically and a swivel component that allows the tray component to swivel horizontally. An auxiliary mass 300 is actively driven by an auxiliary mass driving portion 360.