It is an objective of the present disclosure to prevent or reduce cracks in edge portions of raised portions of a diffractive optical element. A user of a portable device having a NFC reader, a voice input interface, a speech recognition system, and memory enables the NFC reader of the portable device to touch a NFC tag or reader found on an object. As a result, defects as review targets are narrowed down and extracted automatically using the filter function and the sampling function in combination. Thus, the CMP slurry can be advantageously used in processes for manufacturing semiconductor devices requiring fine patterns and can improve the reliability and production of semiconductor devices through the use thereof in semiconductor processes.