A machining program transmission system 1 has a control device of an NC machine tool 10, a transmission device 20 and a terminal device 40 are connected via an electrical communication line 2. The compressor is fluidly connected to the evaporator. Other embodiments relate to methods of delivering and dispersing the nanoparticles through the material or a surface layer. A processing fluid is introduced onto the top or bottom surface of the wafer, or onto both surfaces, at a central location.