Optics, such as, for example, micro lithographic projection exposure apparatus illumination optics, as well as related systems, methods, components and devices are disclosed. The insert comprises a substrate of mono-crystalline silicon. The dashpot of each control rod guide thimble includes a small diameter section having an outer diameter smaller than that of the control rod guide thimble formed at an upper portion of the dashpot, and a large diameter section having an outer diameter substantially equal to that of the control rod guide thimble formed at a lower portion of the dashpot. A connector element is provided which is connected to the rod and extends substantially in line with this and comprises a sideways extending housing, in which said drivable toothed wheel is present.