Ruthenium, osmium and their oxides can be etched simply and rapidly by supplying an atomic oxygen-donating gas, typically ozone, to the aforementioned metals and their oxides through catalysis between the metals and their reactors and application of the catalysis not only to the etching but also to chamber cleaning ensures stable operation of reactors and production of high quality devices. The BCP comprises first and second interconnected BCP components with a functional group at the junction or interface of the components. Following extrusion, the frame profile may be stored, cut, trimmed, cure, etc. A flexible air-impervious outer layer is positioned concentrically around the fabric, with the bladder wall and the outer layer defining an elongated annular space, and with the fabric being positioned within the elongated annular space. An elasticflexible guide strip that extends in the transport direction over the entire length of the transport belt is clamped in place relative to the attachment profile.