The present invention provides an insulating sheet which is used for bonding a heat conductor having a thermal conductivity of 10 Wm\xb7K or higher to an electrically conductive layer. The passageways include wells having porous membrane wall portions that enable a molecular-sized activating agent in a carrier fluid that enhances an immune response to pass through these porous wall portions. The floating gate has a first sourcedrain region and a second sourcedrain region separated by a channel region in a substrate. Application of a potential difference across the electrodes causes the compliant electrode and the membrane to be attracted into the flow channel.