Systems and methods for repositioning selectable content. The system and method includes a lubricant having a viscosity from about 0. There is then planarized the surface of the IMD contact region. Advantageously, the contact structure comprises a plurality of plugs filled with a non-conductive material between the first conduction terminals and the ferroelectric capacitor, and comprises a plurality of plugs filled with a conductive material and coupled to the second conduction terminals or the control circuitry. The substrate has a plurality of regularly arranged channels that extend through the substrate. Crystallization of the oxide is performed by applying pulsed laser light or pulsed lamp light to the film including the microcrystalline nuclei to form the ferroelectric film.