Systems, apparatuses, and methods of a wireless communications network include identifying a first downlink control channel. A stopper layer is formed over one surface of a substrate, and an element is formed over the stopper layer, and then, the substrate is thinned from the other surface thereof. According to the pressure of gas filled in a gas charge chamber 122 defined by a lid 120 and a diaphragm 130, the diaphragm 130 is displaced, the movement of which is transmitted through a stopper 140 to a shaft member 150. Aggregate is injected into the through hole, and then the substrate, the material injection board and the aggregate are disposed under a high-temperature environment for sintering.