1460714280-aa7dfd9c-0e07-4acc-9723-accd431f584c

Methods for forming ruthenium films and semiconductor devices such as capacitors that include the films are provided. By comparing the dial password entered by the rotation operation of the jog dial and the dial password registered in advance and conducting the user authentication, the user can enter the dial password intuitively and easily just by operating the jog dial and can make the user authentication be executed. The step pedals are coupled to a shaft for rotating the shaft on their downward pivoting through a pair of one way clutches. The configuration diagram may include device icons which represent devices and program icons which represent programs. For example, the invention is applicable to smart cards. The battery is replaceably arranged on the security module, with the casting compound surrounding a first part of the printed circuit board, and a second part of the printed circuit board for the replaceably arranged battery being free of casting compound.