A method of forming a layer on a micro-device workpiece includes dispensing a first pulse of a first precursor at a first region of the workpiece to flow toward a second region of the workpiece. The circuit is used in a ballast inverter to compensate positive resonance frequency shift in the inverter load during lamp starting. At least one parameter associated with sawing the wafer is monitored and the rate of presentation of the wafer to the saw blade is dynamically controlled responsive to the one or more monitored parameters. , a region in which a large number of highlight points are located adjacently or closely is extracted as a bright region.