A method of forming a layer, such as a strontium titanate, barium titanate, or barium-strontium titanate layer, on a substrate by employing a vapor deposition method, particularly a multi-cycle atomic layer deposition process. The VCO has at least one varactor arranged for controlling an output frequency fOut of said VCO by applying a tuning voltage VTune and simultaneously applying a bias voltage VBias on a cathode and an anode of said at least one varactor, respectively. Spatial processor operation may also be optimized to operate in conjunction with orthogonal frequency division multiplexing. Examples of inventive configurational variants include: an elongate structure itself conducting current; a hollow elongate structure accommodating placement therethrough of at least one elongate conductor; an elongate structure flanked by a pair of elongate conductors conducting current in opposite directions; plural elongate structures bordering a centralized elongate conductor. A bridge torque path driveably connects the first input shaft and the output.