A minimum five-axis machine tool has first to third linear feed axes orthogonal to each other as well as first and second rotational feed axes orthogonal to each other, wherein a rotational axis line of the first rotational feed axis C is parallel to the first linear feed axis Z. The strained sourcedrain junction may be shallower and have lower resistivity in some embodiments. The sidewall portion is connected to the top portion along a substantial portion of the periphery of the top portion to provide an arched configuration to the top portion. The timing of release of the agent from the lipid vesicle may be controlled as well as the location of release by timing and localizing the exposure to ionizing radiation exposure. The storage module stores three-dimensional information of a determined face. A rank score is determined for the content item using the bid value and adjusted predicted performance measure.