Films are deposited on a substrate by a process in which atomic layer deposition is used to deposit one layer of the film and pulsed chemical vapor deposition is used to deposit another layer of the film. The impurity doping system realizes an impurity doping not to bring about a rise of a substrate temperature, and measures optically physical properties of a lattice defect generated by the impurity doping step to control such that subsequent steps are optimized. At a border B of the reflector member 12 with the resin base 11, a gradation printed layer 13a is provided. The FIFO circuit includes an array of cells having a register and state controller indicative of the state of the cell. The wireless device receives the microwave energy and the electric energy converter converts the microwave energy to the electrical energy.