A planarization method including the provision of a wafer having a wafer surface. In the invention, said data unit to be transmitted to the upper layer is composed from one or more segments containing one or more errors, wherein information on the location of one or more errors is also transmitted to the upper layer. A diaphragm extends around the shaft and defines fluidly separate upper and lower chambers within a valve body. The SSR is adapted for high current andor deep water applications for purposes of downhole well intervention and subsea equipment installation. A correction circuit automatically applies a correction factor to at least one of the I and Q output signals to correct the gain andor phase error by applying a multiplication factor to at least one of the I and Q output signals to thereby generate a corrected signal.