1460740876-af2a017e-68e0-45e1-b232-df7fa17355ee

Within a method for forming an isolation region within a semiconductor substrate, there is, prior to forming the isolation region within an isolation trench formed adjoining an active region of a semiconductor substrate, implanted a dopant into a corner of the active region. A heater disposed opposite the fixing rotator heats the fixing rotator. Each set of fingers interconnects with a set of fingers of another section to form the LGA connector.