Carbon dioxide, such as may be used for a carbonated beverage, is produced by microwave thermal decomposition of a starting material. 5 to 8 wt % of xanthan gum and 0 to 37. The first of the separately formed patterns is formed by pitch multiplication and the second of the separately formed patterns is formed by conventional photolithography. Hence, the inventive p-SiCOH dielectric film has hydrophobicity improvement as compared with prior art p-SiCOH dielectric films. The cannula has a combination of flexibility and stiffness that assists in accessing body passageways without kinking.