Multiple Network Attached Storage appliances are pooled together by a virtual NAS translator, forming one common name space visible to clients. The FexSi2 has a symmetrical monoclinic crystalline structure belonging to the P21c space group and is synthesized at the surface or in the interior of the crystalline silicon. A buffering layer can be provided intermediate the thin film transistor layer and the fluorine containing layer, with the buffering layer being transmissive of fluorine from the fluorine containing layer during the annealing.