The present invention relates to compounds of formula or pharmaceutically acceptable salts thereof, wherein Q, G, ring A, ring B, R1, R2, R3, R4, R5, R5a, R6, R7, R8, R9, R10, R11, R12, R13, R14, R15, R16, R17, R18, R19, R20, R21, R22, R23, R24, and m are defined herein. A voltage regulator includes multiple phase blocks collectively configured to generate the regulated output voltage. The beam is directed down onto the top surface of the mask and through a slit in a diaphragm onto the workpiece. The optical switches are used in MN optical routing arrays being capable of directing light from any one of the M input ports to any one of the N output ports with additional ADDDROP functions.