A sputtering target is pre-conditioned prior to use of the target in a sputtering process by removing a damaged surface layer of a sputtering surface of the target. The fiber reinforced resin includes a reinforced fiber extending in an extending direction of part forming the frame. Arranged behind the first portion there is a second portion which is provided with one or more second cutting edges and with a second diameter exceeding the first width or diameter. The supporting spline is engagable with a delivery device. The angular contact bearing has a first race, which is integrally formed into the ring gear, a second race, and a plurality of bearing balls disposed between the first and second races.