Installation for vacuum treatment, particularly of substrates, includes several identical independent and aligned modules. The lid body is provided with a slide operation portion located at the front surface side of the lid attachment member and a bridge portion that is integrally molded with the slide operation portion, protrudes toward the rear surface side of the lid attachment member, and extends in the slide direction of the lid body. The upper layer lies on supporting posts that stand on pedestals. A pressurized oxygen product stream is discharged from the anode side of the oxygen transport membrane, the product comprising permeated oxygen and steam. In regional delivery, liquid formulations may be desirable to increase the efficacy and deliverability of the particular drug. The peduncle sustains the inflorescence, and later on the fruit.