There is provided a disk device that prevents entering of foreign matters, and that forms an openingclosing lid using an inclined surface of a front wall so that the disk device has a design according to which the thickness is not noticeable. The system includes an industrial controller configured to control and obtain current parameter data from one or more components of an industrial system. The pattern is transferred into the soft mask layer by an anisotropic etch, which forms a carbon-rich polymer that includes more carbon than fluorine.