An overheated steam oven which discharges overheated steam to an outside after changing the overheated steam of a high temperature into water. The apparatus includes a deposition chamber, a substrate holder for holding a substrate in the deposition chamber, a pressure control gas inflow path for introducing a pressure control gas into the deposition chamber, and a material gas generation portion, provided in the deposition chamber separately from the pressure control gas inflow path, for generating a deposition material gas. A cam assembly is configured to move the intake valve between the first position and the second position. An improved channel interleaver design includes mapping from coded bits of different code blocks to modulation symbols, and mapping from modulation symbols to time, frequency, and spatial resources, to make sure each code block to get roughly the same level of protection. Also, the conductive pattern may have a shape as the recognition mark or the through hole may have the shape as the recognition mark. In one embodiment, the invention provides a method of forming a photovoltaic material, the method comprising: depositing an inorganic capped nanoparticle solution onto a substrate; and heating the substrate.