A computer software system is disclosed for facilitating a user’s replacement or insertion of devices in a computer server network system. The data clusters account for inter-level parasitic values without flattening the circuit model to a lower hierarchical level and operate as an information graph or network between nodes, which can be used with the standard, or default, information graph between nodes. In processing a wafer W, the substrate processing apparatus moves the fluid suppliers 61, 62, 63 along the peripheral part of the wafer W relatively. The system also performs a second set of less aggressive RET operations on other non-critical regions of the layout. % of a polysiloxane-polycarbonate copolymer comprising about 8 to about 30 wt.