An energetic composite material is provided that includes inorganic particles and self-assembled monolayers formed on the inorganic particles. Also disclosed is a method for forming the contact structure which comprises depositing a titanium layer in the bottom of a contact opening having oxide insulation sidewalls, forming an overlying layer of polysilicon above the titanium layer, and annealing the two layers together. The at least one demodulation unit demodulates a gyro output signal provided by the gyroscope with a reference signal.