A source-collector module for an extreme ultraviolet lithography system, the module including a laser-produced plasma that generates EUV radiation and a grazing-incidence collector mirror arranged relative thereto and having an input end and an output end. The casing encloses a scroll housing with a curved inside surface in which a blower is disposed. The arms can be in any suitable configuration, such as \u201cC\u201d, \u201cV\u201d, Omega or any Umega configurations. The source of the high-voltage NMOS transistor is connected to the drain of the low-voltage NMOS transistor.