An anti-piracy software licensing system associates a license file with a particular software product, so that the license file cannot be used with a separate product. A first output unit and a second output unit are adjacent to each other. The copper layer is polished by means of a chemical mechanical polishing process to form a copper wiring within a damascene pattern. A signature associated with the uploaded document is verified using a currently selected signature verification key from the ordered sequence. In one implementation, the injection duration is logged by using a trigger release switch and an end-of-stroke switch. In the invention, a gate insulating film, a conductive film, and a resist are formed in sequence over a semiconductor film and a resist is hardened while pressing a mold formed with a pattern to the resist.