A USB bus-powered device in Suspend state that requires active bus state power levels, but has no data transfer need, may initiate Resume signaling to return a USB bus segment to active state, without transferring any data across the bus. The front-stage transmission section is for transmitting power from an input shaft to an intermediate shaft. The etch process is monitored by measuring an electrical property of either the substrate or the sacrificial electrode or both. In accordance with the present invention, the coupling of the cap to the gutter is accomplished by using one or more clips that are configured to secure the cap to the gutter at one or more locations in a way that allows the gutter and the cap to move independently of one another.