There is disclosed a collective mounting method of electronic components in which a plurality of electronic components can uniformly be pressed to an insulating layer in a short time in a case where the electronic components and a resin layer are fixed. One embodiment of the present invention provides a dielectric chuck body for an electrostatic chuck. An eigenvalue calculation unit 20 calculates a plurality of eigenvalues in a slot, whereas an eigenmode quality calculation unit 21 calculates a single quality for each eigenmode, considering variation frequency of the eigenvalue in the slot and outputs the quality to a transmission adaptive control unit 22. Second word lines correspond to the respective first word lines. The transmitting is delayed until receipt of a trigger from an external source indicating that the radio channel is available.