It is to provide an MEMS switch easy to manufacture, microscopic, and capable of obtaining a sufficient ONOFF capacitance change ratio. Also provided are compositions comprising these biomarker proteins and methods of using these biomarker proteins or panels thereof to diagnose, classify, and monitor various lung conditions. The padlock also includes a blocking plate located between the pin and the lock cylinder core and which is fastened in the lock body. After a period of elapsed time, the natural frequency response is again obtained.