A tip for the dispensing of materials includes a housing having first and second chambers contained therein. This filter is used to purify air by removing foreign matter such as liquid droplets and dust from the air. The housing has mounting grooves for receiving the fixing portions, whereas the fixing portions have retaining portions for biting in edges of the mounting grooves to prevent the fixing portions from coming out of the mounting grooves. The present invention is directed to a polycarboxylic acid copolymer which is obtained by copolymerization of monomer components comprising a polyalkyleneimine unsaturated monomer and an unsaturated carboxylic acid monomer. A variable conductance meter for controlling a pressure inside the processing chamber independently of a flow rate of process gases is included. The generator produces electrical energy from vibration energy, and the sensor detects the state of the door lock mechanism.