A lithographic apparatus including a substrate table position measurement system and a projection system position measurement system to measure a position of the substrate table and the projection system, respectively. In general, an ester reagent ROR\u2032, wherein R\u2032 is a tertiary group and R comprises a functional group X, is reacted with a water soluble, non-peptidic polymer POLY-Y, where Y is a functional group which reacts with X to form a covalent bond, to form a tertiary ester of the polymer, which is then treated with a strong base in aqueous solution, to form a carboxylate salt of the polymer. The resolution acquisition section acquires a resolution of each of a plurality of temporally-consecutive images. A controller adjusts the parameters of the charged particle beam andor the detection arrangement, based upon the first output of the detection arrangement, so as to adjust the second output of the detection arrangement. A NAS server includes a third interface and a fourth interface. One of the ends of all elements has a ground level or zero voltage increasing progressively towards the other end in the positive voltage elements and decreasing progressively in the negative voltage elements in such a way that the elements in each group have equipotential voltages at the same level or distance from the ground level.