A substrate holder to adapt a small wafer to a wafer table of a lithographic apparatus adapted to receive a larger wafer includes a plate member with a burl pattern on which the small wafer is to be placed, positioning pins to locate the small wafer and a clamp formed by a clamp ring and magnets attached to the plate member. The agglomerate removal device can include an agglomerate capture device and an agglomerate withdrawal device. A current in the actuator is identified to form a measured current. Attached to the bottom of the base are adjustable feet for leveling of the rail post bracket. Flags, windows and paper simulating brick or stone may be added to the castle to add to its realistic appearance.