An illumination optical unit for a mask inspection system is used with EUV illumination light. The transparent substrate may have first and second opposing surfaces, and the pattern of radiation blocking regions may be on at least one of the first andor second surfaces of the transparent substrate. Antisense anti-Cdc6 DNA technology is used to test Cdc6 as a target for growth inhibition and shows that the abrogation of Cdc6 mRNA in rapid cell results in death of prostate PC-3, DU145 and LNCaP cancer cells. The second member and the fluid maximize heat transfer at a first portion of the thermally conductive wall. If not, the method includes generating key material using the security module, and generating the authentication information based on at least the key material for use in the predetermined authentication procedure with the communication system. The trajectories of the material may be elongated.