The invention relates to a device comprising at least one safety shut-off control valve. An optically timed deposition phase is provided comprising providing a flow of deposition phase gas, detecting the presence of deposition gas within the plasma processing chamber, providing RF energy for forming a plasma from the deposition phase gas in the plasma processing chamber, and stopping the flow of the deposition gas into the plasma processing chamber. A cam is mounted around the gear wheel, a counterweight surrounds the piston cylinder, and a cam follower is provided on the counterweight. The method may further comprise feeding the data stream to the AI algorithm to classify the variables in the data stream. By the present invention, there is obtained a release of the active component over a longer period of time than by the use of the active itself.