The present invention provides a self-detecting SPM probe constructed from a cantilever provided with a piezoresistance and typified by a self-detecting type SPM probe that does not generate leakage current while measuring a surface potential of a sample. The heater includes a flat ceramic substrate and a beating element formed on one surface of or in the interior of the ceramic substrate. The limiting switch includes a first rod, a second rod, a first switching element and a second switching element. Furthermore, a motor vehicle drive is indicated which is equipped with such a control device or such a microprocessor. Memory cells are positioned along the vertical lines, including a bidirectional access device coupled in series with a memory element. 05 to 1 mm thick or from 5% to 10% of the laminate thickness.