A test probe alignment apparatus includes a rotatable \u03b8 stage that is decoupled from a workpiece positioning stage so that the workpiece positioning stage can move a workpiece in an X-Y plane without moving the \u03b8 stage, thereby inhibiting vibration in and inertia of the workpiece positioning stage, and improving the speed and accuracy of workpiece movements. The electrode carrier includes a lattice region defining segmented electrode receiving openings. A movement calculation block calculates a forward moving speed of the moving body and angular velocities thereof in both a pitch direction and a pan direction.