1460805739-d0c9e638-0b7e-4012-82d6-afb43605da2d

A pattern correcting method of an embodiment computes a distribution of pattern coverages on a design layout of a circuit pattern in the vicinity of a position that becomes an error pattern in a case where an on-substrate pattern is formed. The storage case has a case bottom and two doors. The consumption of the data may be governed by specific rules. The BCSF material may be doped with potassium, rubidium, or sodium. 5, 2001, the contents of which are herein incorporated by reference in their entirety.