For connecting a connection object having first and second surfaces opposite to each other in a first direction, an electrical connector is provided with a ground plate in addition to primary ground contacts and signal contacts. The coil terminal is a component formed by integrating the terminal, the winding wire binding portion, and a portion to be engaged. The transport unit transfers a phase plate into the TEM through the airlock chamber. The starting air manifold is fluidly connected to the pressurized starting air source. A seed region is crystallized by the diffused metal catalyst.