There are provided novel compounds of formula wherein A, R1, R3, R4, R5, T, U, V, W, X and Y are as defined in the specification, and pharmaceutically acceptable salts thereof; together with processes for their preparation, compositions containing them and their use in therapy. A front axle and a rear axle may be attached to the frame. The application instance divides the job in a way that is suitable for the particular application and sends, to the control process, assignment information that describes how the job is to be divided. The method includes preparing at least one wafer, attaching at least one film onto a back surface of the wafer to support the wafer, forming wafer chips by dicing the wafer, detaching the at least one film from the wafer chips and attaching at least one base film onto the wafer chips to support the wafer chips. The non-contact brake assembly has a first brake element mounted on the base and a second brake element mounted on the tray assembly and un-contacting the first brake element. In one embodiment, the solvent is normally in gazeous state at ambient temperature and pressure values, but is used mainly in liquid state within the method and apparatus of the present invention by maintaining such pressure and temperature values within the apparatus so that the solvent will remain in this liquid state.