1460807585-dde25891-ce5b-4b8c-89c3-3d3fd58548bf

In one embodiment, an apparatus for generating a gaseous chemical precursor used in a vapor deposition processing system is provided which includes a canister comprising a sidewall, a top, and a bottom encompassing an interior volume therein, an inlet port and an outlet port in fluid communication with the interior volume, and an inlet tube extending from the inlet port into the canister. The markings are removably attached to their associated tools and dies and, when detached, they are accessible to the scanning device for the scanning process. Thus, the bridge plate is stably supported, and the body is not broken due to stress concentration. Additional solutions, methods and implementations are detailed in the disclosure. The conductors have oblong, tear drop shaped cross-sections extending laterally of the die active face beyond the respective internal contacts, and contact the interconnectors at positions spaced further apart than the internal contacts.